Method and device for the transmission of high speed radiation, particularly corpuscular radiation, between spaces of different pressure



1958 K. H. STEIGERNALD 2,324,232

METHOD AND DEVICE FOR THE TRANSMISSION OF HIGH SPEED RADIATION,PARTICULARLY CORPUSCULAB RADIATION;

BETWEEN SPACES OF DIFFERENT PRESSURE 5 Sheets-Sheet 1 Filed Oct. 24, 1956 E851 1958 K H. STEEGERWALD 2,824,232

METHOD AND DEVICE FOR THE TRANSMISSION OF HIGH SPEED RADIATION,PARTICULARLY CORPUSCULAR RADIATIQN.

BETWEEN SPACES OF DIFFERENT PRESSURE Filed Oct. 24,}956 5 Sheets-Sheet 2b r i P W/JW/AW/ 21 i v I r l i '7 33 I :n l I 37 29 L Q E n 1: zf? f j40 7 d 34 5 35 3'1 1958 K. H. TEIGERWALD 2,

METHOD AND nsvzcs FOR THE TRANSMISSION OF HIGH SPEED RADIATION.PARTICULARLY CORPUSCULAR RADIATION,

BETWEEN SPACES OF DIFFERENT PRESSURE Filed Oct. 24. 1956 s Sheets-Sheet3 Fig.3

Feb. 18, N53 K, .s'z'EaGERwALD 2,824,232

METHOD AND DEVICE THE TRANSMISSION I HIGH SPEED RAUIA N, PARTICUL YRPUSC R "I ION,

WEEN SPACES FEREN RESSU Filed Oct. 24. 1956 5 Sheets-Sheet 4 Fig. 5

9 SH SF 2,824,...32

FED

1953 STEEGERWALD mom ma DEVICE FOR 1% musmsszon or a:

RADIATION, PARTICULARLY CORPUSCULAR RADIATIQN 35mm; SPACES OF DIFFERENTPRESSURE 5 Sheets-Sheet 5 Filed Oct. 24, 19"

iinited States Patent METHOD AND DEVICE FOR THE TRANSMISSEGN OF HIGHSEEED RADIATHON, ?ARTICULARLY ililRlUSCULAR RADEATI'DN, EETWEEN SFACFEOF DIFFERENT PRESSURE Kari Heinz Steigerwald, Heidenheim, Wurtternberg,Germany, assignor to (Sari Zeiss, Heidenheim {Brena}, Wurttemberg,Germany Application October 24, 1956, Serial him $18,957

Claims priority, application Germany October 29, 1955 3 Claims. or.250-495 "The invention relates to a method and device for thetransmission of high speed radiation, particularly corpuscularradiation, between spaces of difierent pressures.

In order to enable the transition of high speed radiation, particularlycorpuscular radiation, between spaces subjected to different pressureswithout alteration of the pressure in these spaces one makes use oftransparent windows, e. g., of Lenard windows. in such an arrangementthe absorption caused by the windows is the main cause of disturbanceand leads in certain circumstances to a destruction of the windows. Ithas also been proposed to arrange intermediate pressure chambers betweenspaces of difierent pressure. Such chambers are described e. g. in theGerman patent specification 916,341. in such an arrangement eachintermediate pressure chamber stands under another pressure and isprovided with apertures. All said chambers are connected to vacuumpumps. The capacity of these pumps limits the size of the aperturesemployed to let the radiation pass through. This may cause difficultiesin designing the path of the rays and also is apt to cause a loss ofintensity.

According to the invention the transition of high speed radiation,particularly corpuscular radiation, between spaces standing underdifierent pressure provided with apertures for the radiation to passthrough is made possible without alteration of the pressure in thesespaces by having the apertures of two spaces of different pressurealternately connected to each other and separated from each other by adevice arranged between said apertures of the two spaces and providedwith apertures for letting 45 the radiation pass through.

During the separation of the apertures of the two spaces the gas havingpenetrated into the apertures of said device is removed and theradiation is interrupted. In this method use is made of the differencebetween the speed of the radiation and the speed of the gas molecules.The time during which the two spaces standing under difierent pressureare connected by anaperture of said device being arranged between theapertures of the two spaces is kept shorter than the time which the gasmolecules penetrating into connecting aperture of said device require topass through it. In this case no molecules can penetrate from the spaceof higher pressure into the space of lower pressure. If the space orlower pressure is connected to a high vacum pump it is also possible tolimit the time during which two spaces are connected so that only such asmall portion of the gas molecules can pass through the connectingapertures, which can be drawn off by the vacuum pump.

For the realization of the method according to the invention there is aseparating chamber arranged between two spaces standing under dilierentpressure. This separating chamber contains a device fitted with boreswhich is moved between the apertures of the two spaces. In saidseparating chamber there is further arranged a control device which uponseparation of the apertures of the two spaces interrupts the radiation.In order to render ice possible the'removal of the gas penetrated intothe bores of said device during connecting the two spaces the sepa-.rating chamber is connected to a vacuum pump.

According to one embodiment of the invention there 5 is arranged withintheseparating chamber a disc fitted with a circular series of holes.This disc is moved between the apertures of the two spaces standingunder different pressure so that the holes in that disc alternatelyconnect and separate the apertures of the two spaces. Said disc isground plane and parallel. The apertures of the two spaces carryadjustable and interchangeable diaphragms. 'rfhereby it is made possibleto keep the distances between the disc and the walls of the two spacesvery With advantage the spindle of the perforated :5 disc is coupledwith the rotor or an electromotor e. g. of a synchronous motor. In orderto avoid too high speeds of revolution of the disc arranged in theseparating chamber it is further advantageous to use two synchronouslycounter-rotating discs.

A particularly advantageous arrangement is obtained if according to afurther embodiment of the invention a drum fitted with radial bores isarranged within the separating chmber. This drum may be arranged on acommon spindle with the rotor of a synchronous motor lying at rightangles to the direction of propagation of the radiation. in order tokeep the distance between the periphery of the drum and the walls of thetwo spaces as small as possible the sides of these walls which lietowards the drum are ground cylindrically. in this embodiment aparticularly simple controlling device for the radiation may bearranged. The separating chamber may e. g. carry windows through whichlight enters into the separating chamber. This light passes throughbores in the drum and is thereafter incidentupon a photoelectric cell.The electrical voltage produced in this cell serves to control theradiation to be passed through the bores in that drum. The arrangementis therein made in such a way that light can only penetrate through thebores of the drum when the two spaces to be connected are incommunication through the bores in the drum.

According to a still further embodiment of the invention there isarranged inside the rotating drum a fixed drum also fitted withapertures whose apertures stand opposite those of the spaces to beconnected. The connection of the two spaces in this case takes place onthe one hand via the rotating drum and on the other via the fixed drum.In this case it is possible to keep practically all the amount of gasentering the bores of the rotating drum from entering into the spaceinside the fixed drum. It is therein advantageous to subdivide theseparating chamber containing two drums into four spaces. The two spacesin the separating chamber which are next to the space standing underhigher pressure are connected to a pump which produces high suction atcomparatively high pressures. Such a pump has been selected for thereason that in these two spaces the gas molecules collect which enterthrough the aperture of the space of higher pressure and are pulledalong by the rotating drum. correspondingly a somewhat higher pressurethan in the 59 two upper spaces results in these two lower spaces of theseparating chamber. These two upper spaces are therefore connected to apump producing high suction at low pressures. Instead of the devices sofar described other devices may be also arrangedin the separatingchamber which serve for the alternating opening and closing of thecommunication between the spaces standing under ditterent pressure. Forinstance there may be arranged in the separating chamber an oscillatingsystem which also contains bores. Similar etfects may also be obtainedwith systems of which parts roll upon the sealing surfaces or/and uponeach other and which thereby alternately 'rotating discs are employed.

escapee connect and separate the two spaces standing under dif ferentpressure. in all these arrangements it is comparatively simple to fit acontrol device for the radiation. This may in principle beelectro-magnetic, photo-electrical, or of any kind or manner suited tothe particular case in which magnetic or capacitive sensing devices areused.

In order to obtain a sufliient intensity of the rays while the twospaces are connected to each other e. g. the accelerating voltage of theradiation producing system may be periodically varied. Velocitymodulation is effected thereby so that upon connecting the two spaces toeach other radiation of high intensity can be passed through thecommunication opening.

in order to assist the efilciency of the devices so far describedaccording to a further characteristic of the invention there is excitedin the aperture of the space of higher pressure a sound oscillationwhich upon opening of the communication between the two spaces producesa negative pressure at the edge of the separating chamber. This soundoscillation may be produced by an electromagnetic system. it may,however, also be produced by tuning the air column contained in theaperture of the space of higher pressure to the frequency of opening.

According to a further characteristic of the invention the aperture ofthe space of higher pressure contains lateral channels through which gasor vapor passes in the direction towards the space orargti'efpresaarsarhigh velocity. Such an aperture with lateral channels may also bearranged below the aperture of the space of higher pressure. With thedevices described it is also possible to transmit a plurality ofcorpuscular rays through two spaces standing under different pressurethrough difierent apertures.

The invention consists in the novel steps and novel parts and in thecombination and arrangements thereof which are defined in the appendedclaims and of which a few embodiments are exemplified in theaccompanying drawings which are hereinafter particularly described andexplained.

In the drawings Figure l is a sectional view of a device for treatingmaterial with a charge carrying ray, in which device the method fortransmitting high speed radiation, particularly corpuscular radiationbetween spaces subjected to different pressures is employed.

Figure 2 is a sectional view of a similar device for transmitting highspeed radiation between spaces subjected to difierent pressures in whicha rotary disc is em- Figure 4 is a sectional view of still anotherdevice according to the invention in which a rotary drum is employed.

Figure 4 along the line 51-51'.

Figure 6 is a sectional view of another device according to theinvention in which a rotary drum and a stationary drum are employed.

Figure 7 is a sectional view of a device for acoustical tuning of theair column of the spaces subjected to the higher pressure of theaperture frequency.

Figure 8 is a sectional view of a device for producing a sound wave inthe aperture of thespace subjected to the higher pressure by means ofelectromagnetic means. V

Figure 9 is a sectional view of a device for reducing the air pressurein the aperture of the space subjected to the higher pressure.

Figure 10 is a sectional view of a device for cooling the aperturesthrough which the charge carrying ray passes.

Figure 11 is a sectional view or" an arrangement employing" a pluralityof movable devices containing separatin chambers between the spaces ofdifferent pressure.

Figure 12 is a sectional view of a device according to the inventionwhich employs molded bodies which slide relative to the apertures in thespaces of different pressures;

Figure 1 illustrates an arrangement for treating material by means ofcharge carrying rays. The space 1 contains a ray producing system andhas produced therein a high vacuum. The space 2 contains the material 15to be treated and is under atmospheric pressure. The ray producingsystem in the space 1 consists of a cathode 3, a Wehnelt cylinder 4, ananode 5 and two diaphragms 6 and 7. Below the diaphragm '7 there isarranged an electromagnetic lens 8 which is employed for focusing theelectron beam. The space 1 is connected by pipelines with a dlfiusionpump 9. The electron beam 12 leaves the space 1 through the aperture 10.Below this aperture 10 is arranged aseparation chamber 11 which isconnected with the rotary pump 26. In this chamber 11 there ismaintained for instance a pressure of 16- Torr. The aperture ll? of thespace '1 is followed by the aperture 13 in the separation chamber 11.The aperture serving for the discharge of the charge carrying beam fromthe chamber ll is designated with 14. Below this last mentioned aperture14 is arranged the material 15 to be treated in the space 2 in which, asalready mentioned, prevails atmospheric pressure.

A plate 16 having an aperture 17 is arranged between the apertures 13and 14. The arrangement is such that between the plate 16 and theadjacent walls of the chamber 11 which contain the apertures 13 and 14there remains a very small air gap. 'Ihis air gap is required so thatthe plate 16 may be moved laterally between the apertures 13 and 14. Theplate 16 is mounted on ball bearings 18 and is reciprocated by means ofa rotary disk 19 provided with an eccentric pin 20 which engages a crossslot in the plate 16. when the plate 16 is caused to reciprocate thecommunication between the apertures 13 and 14 is alternately opened andclosed. At the instant the apertures 13 and 14 are in registration withthe aperture 17 gas molecules or a pressure wave respectively, from thespace 2 enters the interior of the aperture 17 and moves toward thespace 1. According to the invention the time period during which theapertures 13 and 14 and 17 are in registration with each other is madeso short that it is less than the time period which is required by thegas molecules entering the aperture 17 to pass through the same.

The longest time for' passing through the aperture 17 is available forthose molecules which at the start of the registration of the apertures17 and 14 enter the aperture 17. Assuming that a small portion of thesemolecules pass in a straight line through the aperture 17 and are aboutto enter the aperture 13 at the end of the registration of the aperture17 and 13 the strictest requirement for the speed of the plate 16 is theone which permits the establishment of a non-registration prior to thetime such a molecule may pass through the opening 17. If one assumesthat the molecular speed is 600 meters per second and that the length ofthe aperture 17 is 2 centimeters then the registration time between theapertures l3, l4 and 17 must not be longer than .34X10- seconds.

At the instant the apertures 13, 14 and 17 are in registration with eachother, button 22 fixedly mounted on the plate 16 and consisting ofterm-magnetic material is positioned directly opposite the core of acoil 23. When this happens there is produced in the coil 23 a currentimpulse which is amplified by an amplifier 24 and is conducted by theline 25 to the Wehnelt cylinder 4 of the ray producing system. Thiscurrent impulse causes the production of the electron beam 12 while onthe other hand the electron beam remains shut off as long as no currentimpulse is received by the Wehnelt cylinder. This has the result thatonly inthat instant in which the apertures 13, 14 and 17 are inregistration with each other an electron beam 12 is produced and mayreach the material 15 while during all other times in which noregistration of the apertures 13, 14 and 17 takes place the electronbeam 12 is shut ed and therefore an undesirable heating of the parts inthe path of this electron beam does not take place. During the time theapertures 13 and 14 are closed by a solid portion of the plate 15 thegas which has entered the aperture 17 is removed therefrom by the pump26.

Figure 2 illustrates another embodiment of the invention in which inplace of the reciprocating plate 16, as shown in Figure 1, there isemployed a rotary disc 27. The high vacuum vessel 28 is in similarmanner as shown in Figure 1, provided with a system for producing acorpuscular radiation which leaves the vessel 28 through an aperture 29.The high vacuum vessel 28 has attached thereto an intermediate pressurechamber 39 in which rotary disc 27 is mounted. This disc at its centeris attached rigidly to a sleeve 31 which in turn forms a portion or" asquirrel cage rotor 32. The rotor 32 and the stator 33 form together asynchronous motor which is mounted in the chamber 30. This chamber 30 isconnected by means of a pipe 34'; with a not illustrated vacuum pump andthere is maintained in the chamber 30 a pressure of approximately 10-Torr. Below the chamber 30 there is arranged in similar manner, as shownin Figure l, the chamber in which atmospheric pressure em'sts and inwhich the material to be treated is arranged. The intermediate pressurechamber 30 is in communication with the lower chamber by means or" anaperture 35'. The rotary disc is provided along its circumference with aseries of apertures 40 and the opposed rim faces of this disc 27 along.the circumference are ground plane parallel. These ground faces rotatebetween the diaphragm bodies 35 and 37 in such a manner that between thediaphragm faces and the circumference of the disc there is produced avery narrow gap. The diaphragm bodies 35 and 37 are secured into wallsof the intermediate pressure chamber 30 and the high vacuum vessel 28respectively, by means or" a thread so that it is possible to adjust thediaphragm bodies for changing the air gap between the diaphragm bodiesand the circumferential portion 36 of the rotary disc 27. it is alsopossible to exchange the diaphragm bodies 35 and 37 by other ones havinga different size aperture 32' andZfi, respectively.

The sleeve 31 is mounted on an axle 33 by means of ball bearings andtherefore is easily rotatable. The axle 38 is provided with an axialbore 39 closed at the lower end of the axle 38 and this axial bore isadapted to be used for the insertion of a cooling fluid for cooling thebearings. If one again assumes that the molecules have a speed of 600meters per second while the length of the apertures 40 in thecircumferential portion 36 of the disc 27 is 2 centimeters long whilethe diameters of the apertures 40 are l millimeter then it is necessaryfor fulfilling the above mentioned requirement that the disc 27 has theaperture 40 arranged on a circle having a diameter of 20 centimeters andthat the disc 27 rotates with a speed of 6000 R. P. M. when. from thebeginning to the end of the registration of the apertures a path of 2millimeters is assumed. The total time of registration will then be.32Xlseconds while a molecule for passing through the aperture 40 wouldrequire for a length of 2 centimeters a time period of .34Xl0- seconds.

In Figure 3 is disclosed still another embodiment of the invention inwhich the high vacuum vessel 28 has attached to its lower end anintermediate pressure chamber 41 which contains 2 rotary discs 27 and 42rotating in opposite directions but in synchronism. The disc 27 isprovided with an aperture rim 36 provided with the apertures 40 whilethe rotary disc 42 is provided with an aperture rim 43 provided withapertures 44. The rotary disc 27 is attached by means of a sleeve 31fixedly witha squirrel cage rotor constitute a synchronous motorarranged in the intermediate pressure chamber 41. The rotary disc 42 isconnected by means of a sleeve 31 fixedly to a squirrel cage rotor 32.The rotor forms with the stator 33' another synchronous motor. The twoarmatures rotate about the axles 33 and 38' of the two synchronousmotors in such a manner that the two discs 27 and 42 rotatesynchronously, but in opposite directions. In order to obtain in eachposition of the two discs 27 and 42 absolutely correct synchronousoperation the disc 27 is provided with an exterior toothed rim 45 whichengages another toothed rim 46 on the disc 42. In this case also therays pass through diaphragm bodies 35 and 37 which by means of a threadare adjustably and exchangeabiy mounted in the walls of the intermediatepressure chamber 41 and the high vacuum vessel 23, respectively.

When employing two synchronous and oppositely rotating discs it ispossible to employ a lower speed of revolutions of said discs, namely, aspeed of 3000 R; F. M. assuming that the total length of the apertures40 and 44 in the discs 27 and 42, respectively, does not exceed 2centimeters. In place of decreasing the speed of the discs one may alsodecrease the total length of the apertures 40 and 44 from 2 centimetersto one centimeter.

In many cases it is necessary to cool the parts of the disc throughwhich the apertures extend. For this purpose may be used for instancethe device illustrated in Figure 10. It may be assumed that thediaphragm body 47 is provided with an aperture 48 through which a chargecarrier beam passes. In order to prevent an undesirable heating of thediaphragm body 47 the aperture 48 is surrounded by a cooling systemconsisting of a pipe. The cooling medium is admitted at 49 and isdischarged by S0. 7

The Figures 4 and 5 show still another embodiment of the presentinvention. Figure 5 illustrates a sectional view of Figure 4substantially along the line 5151'. The intermediate pressure chamber 52is arranged below the high vacuum vessel 28' and below said intermediatepressure chamber 52 there is arranged a chamber under atmosphericpressure containing the material to be treated. A charge carrying beamis intended to leave the high vacuum vessel 28' through the aperture 53.Av rotary drum 54 is arranged in the intermediate pressure chamber 52and moves past two cylindrical ground faces 56 and 57 arranged ondiametrically opposed zones of the intermediate pressure chamber 52. Thearrangement is such that there remains a very. small gap between thesurfaces 56, 57iand the circumference of the drum 54. The apertures 53and 55 are arranged opposed to each other in the. upper. and lower wallsof the chamber 52. The drum 54 is provided with radial portions orapertures 58 which are adapted to come into registration alternatelywith the-apertures 53 and 55, respectively. The

axis of rotation of the drum 54 is arranged at a right angle to thedirectionof the charge carrying beam. The drum 54 is attached at one endof a tubular shaft 59 (Fig. 5) of a squirrel cage rotor 60 and isrotatably supported in roller bearing 61. The intermediate pressurechamber 52 increases in size rearwardly to accommodate the stator 62 ofthe synchronous motor. The chamber 52 is evacuated through an axialopening 63 so that the gas molecules enteringthe minute aperture 55 areremoved from thechamber 52 before they have a chanceto enter theaperture 53.

The modified arrangement of the invention as illustrated in the Figures4 and 5 has over the modification illustrated in Figure 2 the advantagethat the drum 54 has a substantially smaller diameter than the disc 27.The drum 54 has to rotate however with a very high speed. if, forinstance the drum 54 has a diameter of 2 centimeters the circumferentialspeed of the drum will have to be approximately 30000 R. P. M. when theminute apertures haveadiameter of l millimeterinorder to fulfill theabove 32. The parts 32 and 33 mentioned requirement. It is, however,easily possible to rotate drums of such a small diameter with such ahigh speed by employing suitable materials. The synchronous motorconsisting of the rotor and the stator 62 may for instance be energizedby an electric current having a frequency of 500 Hz.

In order to control the charge carrying beam in synchronism with theregistration taking place between the apertures 53 and 55 one may employfor instance the photo electric device illustrated diagrammatically inFigure 4. For this purpose the intermediate pressure chamber 52 isprovided with oppositely arranged windows 64 and 65 and a'source oflight 66 emits a light beam 67 which is directed into the window 64.This light beam 67 is deflected by the reflectors 68, 69' and 70, 71 andfinally reaches a photo electric cell 72. it will be noted thatthe lightbeam during its passage through the cham- In Figure 6 is illustratedstill another arrangement of the invention, namely, a vacuum technicalrefinement of the arrangement illustrated in the Figs. 4 and 5. Abovethe upper wall of the casing 81 is arranged, as described already, thehigh vacuum vessel (not shown). in this upper wall is arranged anaperture 73 while the lower wall of the housing 81 contains an aperture74 which is in communication with a housing arranged below the housing81 and this lower housing is under atmospheric pressure. A rotary drum75 is arranged in the same manner as the drum 54 in Fig. 4. However, inthe interior of the drum 75 is arranged a. stationary drum 76 providedwith the diametrically opposed bores or passages 77 and 78. These lastmentioned passages are arranged in alignment with the apertures 73 and74. The drum 76 avoids that the gas molecules which are in the apertures79 of the drum 75 enter the space 80 in the interior of the drum 76, andthis has the result that the gas molecules for all practical purposesare prevented from entering the high vacuum vessel which is arrangedabove the casing 81.

Owing to the very high circumferential speed of the drum 75 it is notvery well possible to employ in the arrangement of Fig. 6 any sealingdevices which touch the drum 75. For this reason there is establishedbetween the stationary housing 81 and the drum 75 a narrow gap. The gasmolecules entering the aperture 74 are pulled by the drum 75 when thelatter rotates clockwise into the space 82 of the housing 81. This space82 is separated by a partition 84 from the space 83 and it will be notedthat there is also a very narrow gap between the drum 75 and thepartition 84. .The gas molecules entering the space 82 are substantiallyremoved by a suction pump 85.- This pump 85 produces at relativelyhighpressures a high suction and preferably is constructed as a rotarypump. The space 33 is connected with a diffusion pump 86 which at lowpressures has a very high suction capacity. It is possible to maintainin the space 83 a higher vacuum than in the space 82. A similarseparation by a partition 89 is established in the righthand portion ofthe housing 81 which is provided with the spaces 87 and 88 and which areconnected with the pumps 90 and 91, respectively.

In order to reduce further the possibility of the entrance of gas intothe aperture 74 the present invention contemplates the additional stepof producing sound waves in said aperture 74, namely, sound waves ofsuch a frequency that the same at the point 92 produce at that instant ao Mama... -i-... ..a........s.e.......,,

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low pressure when the apertures "I4 and 79 are in registration. Suchsound waves may be produced in a simple manner by tuning the air columnin the aperture 74 to the opening frequency of the apertures 74 and 70.For this purpose there may be used for instance the arrangementillustrated in Fig. 7. The diaphragm body containing the aperture 74 isprovided with a thread which engages a corresponding thread in acylindrical body 93. By rotating the body 93 relative to the thread onthe housing 81 an acoustic tuning of the air column in the aperture 74is produced.

For the production of a sound wave in the aperture 74 may also beemployed an arrangement as illustrated in Fig. 8. In this arrangementthe aperture 74 is connected between its ends with a lateral passage 94in which is arranged a diaphragm 95 of an electromagnetic system 96which is adapted to produce sound waves.

Furthermore according to another feature of the' present invention thepressure adjacent the aperture 74 may be reduced according to theprinciple of a jet pump. Such an arrangement is illustrateddiagrammatically in Fig. 9. The wall 97 of the housing is provided withan aperture 96 which is in communication with the lateral passages 99and 100. Through these lateral passages compressed air may be forcedwhich will expel the gas molecules contained in the aperture 98 in adirection downwardly, namely, toward the space having a higher pressure.In this manner the pressure above the entrance point 101 is reduced.

In Figure ll is illustrated a further modification of the arrangementillustrated in Fig. 1. Below the high vacuum vessel 1 is arranged aseparation chamber 102 and below .the latter there is arranged anadditional separation chamher 103. Between the apertures 13 and 104 ofthe first intermediate pressure chamber 102 is arranged a plate 105provided with an aperture 106. This plate 105 is reciprocated in thesame manner as it is done with the plate 16 shown in Fig. 1, namely, bymeans of a rotary disc 107 provided with an eccentric pin 107' engaginga slot 105' in the plate 105. Between the apertures 104 and 108 isarranged an additional plate 109 which is provided with an aperture 110.This plate 109 in similar manner as shown in Fig. 1 is reciprocated bymeans of a rotary disc 111 carrying an eccentric pin 111' engaging aslot 109' in the plate 109. Both of the plates 107 and 111 are driven bysynchronous motors and care is taken that these motors operate insynchronism. When the apertures 13, 106, 104 and 108 are in registrationwith each other the electron ray is caused to be produced and is able topass from the vessel 1 into the space 2 arranged below the chamber 103.The space 2 is, as heretofore described, under atmospheric pressure andhas arranged therein the material to be treated. For the control of theelectron beam may be used an arrangement as shown in Fig. 1. When theapertures 13 and 108 are not in communication with each other becausethe plates 105 and 109 are moved to a position in which their apertures106 and are out of registration with said apertures then a rotary pump112 removes any gas molecules from the intermediate pressure chamber 103which have entered this chamber while the gas molecules having enteredthe intermediate pressure chamber 102 are removed by a rotary pump 113.It is in this manner possible to produce in the intermediate pressurechamber 102 substantially less pressure than is produced in theintermediate pressure chamber 103 so that for this reason the rotarypump 113 may be smaller in size than the rotary pump 112. It isfurthermore advisable to make the plate 109 somewhat thinner than theplate 105 and the aperture 110 may be made smaller than the opening 106.

In Fig. 12 is illustrated still another modification of the invention inwhich between a high vacuum vessel 114 and a space 115 subjected'toatmospheric pressure there is arranged an intermediate pressure chamber116 in which I rotary device 123 is mounted. This rotary device 123consists of tour molded bodies 118 which are so shaped and so arrangedthat the same slide upon curved surfaces 121 and 122 arranged in theopposite walls of the intermediate pressure chamber 116. The curvedsurfaces 121 and 122 are intersected by the apertures 119 and 120,respectively. it will be noted that between the apertures 119 and 120and the mentioned molded bodies 118 no air gap is provided. This means,of course, that the apertures E19 and 120 may be completely separatedfrom each other or brought out of communication with each other by therotary device, namely, then when the molded bodies 118 are inregistration with said apertures 119 and 120, respectively. When,however, the two apertures 119 and 120 are in communication with eachother, which takes place between each two molded bodies 118, then theelectron beam may be passed through the space between said molded bodies113 and the gas molecules which have entered the intermediate pressurechamber 116 during the time the aperture 120 is not covered is removedfrom said chamber through a pump 117.

in the foregoing it has been assumed when calculating the duration ofthe time period which is required by the gas molecules to pass throughthe apertures that the gas molecules pass in a straight line throughsaid apertures, but this assumption very likely is not true in actualpractice. It would be much more likely that the molecules do not travelin a straight path and if this is correct then the time periods requiredfor the molecules to pass through the apertures would be greater.Accordingly, it would be possible to increase the duration during whichthe apertures may be left in registration with each other. Furthermore,the speeds of rotation of the rotary systems need not be as high as hasbeen calculated in the foregoing. It is also possible in a very simplemanner to arrange lb when all said apertures are in registration and fortendering said charge carrying beam producing means inoperative when theapertures in said movable members are out of registration with said twoalined apertures, and means for maintaining a high vacuum in said highvacuum chamber.

2. Arrangement for transmitting high-speed radiation, particularlycorpuscular radiation, through spaces of different pressures, includingmeans forming three chambers one next to the other, namely, a highvacuum chamber, an intermediate subatmospheric pressure chamber and anatmospheric pressure chamber, two. walls separating said chambers fromeach other, an aperture in each of said walls, said apertures beingarranged in alinement with one another, a movable member in saidintermediate subatmospheric pressure chamber having an aperture adaptedto be moved into registration with said apertures in said walls, meansadapted to produce a charge carrying beam in said high vacuum chamberand directing it through said three apertures when the same are inregistration, means for moving said movable member to cause its apertureto move out of and into registration with said two alined apertures atsuch a speed that the time during which said three apertures are inregistration is shorter than the time the gas molecules entering theaperture in said movable piate from the chamber of higher pressure needfor passing through said aperture, control means for operating saidcharge carrying beam producing means when said three apertures are inregistration and for rendering said charge carrying beam producing meansinoperative when the aperture in said movable member is out ofregistration with said other two apertures, means for continuouslymaintaining a high vacuum in said high vacuum chamber,

in an arrangement,-as shown in Fig. 2 which employs a.

rotary disc 27 and a single electron beam, a number of electron beamswhich pass through diflferent apertures along the circumference of thedisc 27 so that in this manner a number of high vacuum vessels may beemployed with a single rotary disc 27, as shown in Fig. 2.

in the foregoing the present invention has been described in connectionwith various modifications illustrated in the Pigs. 1-12, inclusive. itis, however, believed that the invention is not limited to these variousembodiments but that the invention can be modified still more and beused in connection with other devices in which it is desired to transmita high speed radiation between spaces of different pressures.

The described modifications may also be changed in various mannerswithin the scope of the present invention and within the scope of theclaims appended hereto.

What I claim is:

1. Arrangement for transmitting high-speed radiation, particularlycorpuscular radiation, through spaces of different pressures, includingmeans forming three chambers one next to the other, namely a high vacuumchamber, an intermediate subatmospheric pressure chamber and anatmospheric pressure chamber, two walls separating said chambers fromeach other, an aperture in each of said walls, said apertures beingarranged in alinement with one another, partitions in said intermediatesubatmospheric pressure chamber dividing it into a plurality ofsections, means for maintaining in each of said sections a differentsubatmospheric pressure, a movable member in each of said sectionshaving an aperture adapted to move into registration with said aperturesin said two walls, means adapted to produce a charge carrying beam insaid high vacuum chamber and directing it through the apertures in saidwalls and in said movable members when all said apertures are inregistration, means for each said movable members to cause theirapertures to move out of and into registration with said alinedapertures, control means for operating said charge carrying beamproducing means and means for continuously maintaining a predeterminedlow pressure in said intermediate subatmospheric pressure chamber, saidatmospheric pressure chamber being employed by receiving the material tobe treated by said high-speed radiation.

3. Arrangement for transmitting high-speed radiation,

- particularly corpuscular radiation, through spaces of differentpressures, including means forming three chambers one next to the other,namely a high vacuum chamber, an intermediate subatmospheric pressurechamber and an atmospheric pressure chamber, two walls separating saidchambers from each other, an aperture in each of said walls, saidapertures being arranged in alinemeut with one another, a rotary disc insaid intermediate subatmospheric pressure chamber being provided alongits circumference with a series of apertures to be moved one after theother into registration with said apertures in said walls, means adaptedto produce a charge carrying beam in said vacuum chamber and directingit through said two apertures when they are in registration with anaperture of said rotary disc, a synchronous motor for rotating therotary disc to cause-its apertures to move out of and into registrationwith said two alined apertures, control means for operating said chargecarrying beam producing means when said apertures in the separatingwalls are connected by an aperture of said rotary disc andfor renderingsaid charge carrying beam producing means inoperativewhen no aperture insaid rotary disc is in registration with said other two apertures, meansfor continuously maintaining a high vacuum in said high vacuum chamber,and means for continuously maintaining a predetermined low pressure insaid intermediate subatmospherlc pressure chamber.

4. Arrangement for transmitting high-speed radiation. particularlycorpuscular radiation, through spaces of different pressures, includingmeans forming three chambers one next to the other, namely a high vacuumchamber, an intermediate subatmospheric pressure chamber and anatmospheric pressure chamber, two walls separating said chambers fromeach other, an aperture in each of said walls, said apertures beingarranged in alinement with one another, two rotary discs in saidintermediate subatmospheric pressure chamber, each of said discs beingprovided along its circumference with a series of apertures to ll bemoved between said two apertures, means adapted to produce a chargecarrying beam in said vacuum chamber and directing it through said twoapertures when these apertures are in registration with one apertureeach of said rotary discs, two synchronous motors for rotating said twodiscs in opposite directions to cause their apertures to move out of andinto registration with said two alined apertures, each of said rotarydisc being provided with a toothed rim, said rims engaging another inorder to obtain absolutely correct synchronous operation of the discs,control means for operating said charge carrying beam producing meanswhen said apertures in the separating walls are connected by oneaperture each of said rotary discs and for rendering said chargecarrying beam producing means inoperative when no aperture in saidrotary discs is in registration with said other two apertures, means forcontinuously maintaining a high vacuum in said high vacuum chamber, andmeans for continuously maintaining a predetermined low pressure in saidintermediate subatmospheric pressure chamber.

5. Arrangement for transmitting high-speed radiation, particularlycorpuscular radiation, through spaces of different pressures, includingmeans forming three chambers one next to the other, namely a high vacuumchamber, an intermediate subatmospheric pressure chamber and anatmospheric pressure chamber, two walls separating said chambers fromeach other, an aperture in each of said walls, said apertures beingarranged in alinement with one another, a rotary drum in saidintermediate subatmospheric pressure chamber being provided with radialapertures opposed diametrically to be moved alternately intoregistration with said two apertures, means adapted to produce a chargecarrying beam in said vacuum chamber and directing it through said twoapertures when they are in registration with diametrically opposedapertures of said rotary drum, a synchronous motor for rotating therotary drum to cause its apertures to move out of and into registrationwith said two alined apertures, control means for operating said chargecarrying beam producing means when said two apertures in the separatingwalls are connected by two diametrically opposed apertures of saidrotary drum and for rendering said charge carrying beam producing meansinoperative when no aperture insaid rotary drum is in registration withsaid other two aper turcs, means for continuously maintaining a highvacuum in said high vacuum chamber, and means for continuouslymaintaining a predetermined low pressure in said intermediatesubatmospheric pressure chamber.

6. Arrangement for transmitting high-speed radiation, particularlycorpuscular radiation, through spaces of different pressures, includingmeans forming three chambers one next to the other, namely a high vacuumchamber, an intermediate subatmospheric pressure chamber and anatmospheric pressure chamber, two walls separating said chambers fromeach other, an aperture in each of said walls, said apertures beingarranged in alinement with one another, a movable member in saidintermediate subatmospheric pressure chamber having an aperture adaptedto be moved into registration with said apertures in said walls, meansadapted to produce a charge carrying beam in said high vacuum chamberand directing it through said three apertures when the same are inregistration, means for moving said movable member to cause its apertureto move out of and into registration with said two alined apertures,photoelectric control means for operating said charge carrying beamproducing means when said three apertures are in registration and forrendering said charge carrying beam producing means inoperative when theaperture in said movable member is out of registration with said othertwo apertures, means for continuously maintaining a high vacuum in saidhigh vacuum chamber, and means for continuously maintaining apredetermined low pressure in said intermediate subatmospheric pressurechamber.

escapes l2 7. Arrangement for transmitting high-speed radiation,particularly corpuscular radiation, through spaces of differentpressures, including means forming three chambers one next to the other,namely a high vacuum chamber, an intermediate subatmospheric pressurechamber and an atmospheric pressure chamber, two walls separating saidchambers from each other, an aperture in each of said walls, saidapertures being arranged in alinement with one another, a movable memberin said intermediate subatrnospheric pressure chamber having an apertureadapted to be moved into registration with said apertures in said walls,means adapted to produce a charge carrying beam in said high vacuumchamber and directing it through said three apertures when the same arein registration, means for moving said movable member to cause itsaperture to move out of and into registration with said two alinedapertures, control means for operating said charge carrying beamproducing means when said three apertures are in registration and forrendering said charge carrying beam producing means inoperative when theaperture in said movable member is out or" registration with said othertwo apertures, the aperture in the wall separating the atmosphericpressure chamber from the intermediate subatmospheric pressure chamberbeing constructed in such a manner and the air column in aperture tunedto the aperture frequency so that when this aperture comes intocommunication with the aperture in said movable member a low pressure isproduced at the edge of the intermediate subatmospheric pressure chamberwhere the aperture connects with said last mentioned chamber, means forcontinuously maintaining a high vacuum in said high vacuum chamber, andmeans for continuously main taining a predetermined low pressure in saidintermediate subatmospheric pressure chamber.

8. Arrangement for transmitting high-speed radiation, particularlycorpuscular radiation, through spaces of different pressures, includingmeans forming three chambers one next to the other, namely a high vacuumchamber, an intermediate subatmospheric pressure chamber and anatmospheric pressure chamber, two walls separating said chambers-fromeach other, an aperture in each of said walls, said apertures beingarranged in alinement with one another, a movable member in saidintermediate subatmospheric pressure chamber-having an aperture adaptedto be moved into registration with said apertures in said walls, meansadapted to produce a charge carrying beam in said high'vacuum chamberand directing it through said three apertures when the same are inregistration, means for moving said movable member to cause its apertureto move out of and into registration with said two alined apertures,control means for operating said charge carrymg beam producing meanswhen said three apertures are in registration and for rendering saidcharge carrying beam producing means inoperative when the aperture insaid movable member is out of registration with said other twoapertures, the aperture in the wall separating the atmospheric pressurechamber from the intermediate subatmospheric chamber being incommunication with lateral passages through which compressed air isforced in a direction toward the atmospheric pressure chamber so thatthe pressure at the edge of the intermediate subatmospheric pressurechamber is reduced, means for continuously maintaining a high vacuum insaid high vacuum chamber, and means for continuously maintaining apredetermined low pressure in said intermediate subatmospheric pressurechamber.

References Cited in the tile of this patent UNITED STATES PATENTS

